Search Results - Isselé, H.

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    Optical metrology of thick photoresist process for advanced 3D applications

    Optical metrology of thick photoresist process for advanced 3D applications by Nolot, E., André, A., Scibetta, C., Poulingue, M., Levin, L., Vignoud, L., Isselé, H.

    Published in Thin solid films
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    Determination of the Young's modulus of a TiN Thin Film by nanoindentation: analytical models and numerical FEM simulation

    Determination of the Young's modulus of a TiN Thin Film by nanoindentation: analytical models and numerical FEM simulation by Isselé, H., Mercier, D., Parry, G., Estevez, R., Vignoud, L., Olagnon, C.

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