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6by SONNET, A. M, GALATAGE, R. V, HINKLE, C. L, VOGEL, E. M, HURLEY, P. K, PELUCCHI, E, THOMAS, K, GOCALINSKA, A, HUANG, J, GOEL, N, BERSUKER, G, KIRK, W. PGet full text
Published in Microelectronic engineering
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9by ZHANG, P. F, NAGLE, R. E, PEMBLE, M. E, HURLEY, P. K, WHATMORE, R. W, DEEPAK, N, POVEY, I. M, GOMENIUK, Y. Y, O'CONNOR, E, PETKOV, N, SCHMIDT, M, O'REGAN, T. P, CHERKAOUI, KGet full text
Published in Microelectronic engineering
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14by Coleman, E., Mirabelli, G., Bolshakov, P., Zhao, P., Caruso, E., Gity, F., Monaghan, S., Cherkaoui, K., Balestra, V., Wallace, R.M., Young, C.D., Duffy, R., Hurley, P.K.Get full text
Published in Solid-state electronics
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20by Byrne, C., Brennan, B., Lundy, R., Bogan, J., Brady, A., Gomeniuk, Y.Y., Monaghan, S., Hurley, P.K., Hughes, G.Get full text
Published in Materials science in semiconductor processing
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