Search Results - Horváth, Zsolt.E.

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    Optimization of co-sputtered CrxAl1−xN thin films for piezoelectric MEMS devices

    Optimization of co-sputtered CrxAl1−xN thin films for piezoelectric MEMS devices by Soleimani, Saeedeh, Kalas, Benjamin, Horváth, Zsolt.E., Zolnai, Zsolt, Czigány, Zsolt, Németh, Attila, Petrik, Péter, Volk, János

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