Search Results - Hemicker, P.

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    ELECTRICAL AND STRUCTURAL-PROPERTIES OF ULTRATHIN SIO2 GATE DIELECTRICS PREPARED UNDER VARIOUS CONDITIONS

    ELECTRICAL AND STRUCTURAL-PROPERTIES OF ULTRATHIN SIO2 GATE DIELECTRICS PREPARED UNDER VARIOUS CONDITIONS by LANGE, P, SCHMIDT, L, PELKA, M, HEMICKER, P, BERNT, H, WINDBRACKE, W

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    Complete x-ray lithography processing of an 8-level 0.4 micron CMOS test device

    Complete x-ray lithography processing of an 8-level 0.4 micron CMOS test device by Staudt-Fischbach, P., Windbracke, W., Bernt, H., Zwicker, G., Friedrich, D., Schliwinski, H.-J., Lange, P., Hemicker, P., Huber, H.-L., Scheunemann, U., Simon, K.

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