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    Electrical Effect of Nitrogen Implanted Into LDD of MOSFETs

    Electrical Effect of Nitrogen Implanted Into LDD of MOSFETs by Song, Yoo Seon, Lenski, Markus, Karim, Mohammed F., Flynn, Keith, Hoentschel, Jan, Peters, Carsten, Sachse, Jens-Uwe, Aydin, Omur Isil, Wu, Jun, Hausdorfer, Bastian, Siddabathula, Mahesh, Semmler, Konrad, Daleiden, Jurgen

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