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Search Results - Harzendorf, Torsten
Search Results - Harzendorf, Torsten
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High performance diffraction gratings made by e-beam lithography
by
Zeitner, Uwe D.
,
Oliva, Maria
,
Fuchs, Frank
,
Michaelis, Dirk
,
Benkenstein, Tino
,
Harzendorf, Torsten
,
Kley, Ernst-Bernhard
Published in
Applied physics. A, Materials science & processing
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Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect
by
Stuerzebecher, Lorenz
,
Harzendorf, Torsten
,
Vogler, Uwe
,
Zeitner, Uwe D
,
Voelkel, Reinhard
Published in
Optics express
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Pulse compression grating fabrication by diffractive proximity photolithography
by
Stuerzebecher, Lorenz
,
Fuchs, Frank
,
Harzendorf, Torsten
,
Zeitner, Uwe D
Published in
Optics letters
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Waveguide Grating Radial Polarizer for the Photolithography of Circularly Symmetrical Optical Elements
by
Jourlin, Yves
,
Tonchev, Svetlen
,
Parriaux, Olivier
,
Sauvage-Vincent, Jean
,
Harzendorf, Torsten
,
Zeitner, Uwe
Published in
IEEE photonics journal
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Black and white fused silica: modified sol-gel process combined with moth-eye structuring for highly absorbing and diffuse reflecting SiO 2 glass
by
Brunner, Robert
,
Kraus, Matthias
,
Hirte, Johannes
,
Diao, Zhaolu
,
Weishaupt, Klaus
,
Spatz, Joachim P.
,
Harzendorf, Torsten
,
Trost, Marcus
,
Munser, Anne-Sophie
,
Schröder, Sven
,
Baer, Michael
Published in
Optics express
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Black and white fused silica: modified sol-gel process combined with moth-eye structuring for highly absorbing and diffuse reflecting SiO2 glass
by
Brunner, Robert
,
Kraus, Matthias
,
Hirte, Johannes
,
Diao, Zhaolu
,
Weishaupt, Klaus
,
Spatz, Joachim P
,
Harzendorf, Torsten
,
Trost, Marcus
,
Munser, Anne-Sophie
,
Schröder, Sven
,
Baer, Michael
Published in
Optics express
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Advanced mask aligner lithography: new illumination system
by
Voelkel, Reinhard
,
Vogler, Uwe
,
Bich, Andreas
,
Pernet, Pascal
,
Weible, Kenneth J
,
Hornung, Michael
,
Zoberbier, Ralph
,
Cullmann, Elmar
,
Stuerzebecher, Lorenz
,
Harzendorf, Torsten
,
Zeitner, Uwe D
Published in
Optics express
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Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling
by
Savenko, Alexey
,
Yildiz, Izzet
,
Petersen, Dirch Hjorth
,
Bøggild, Peter
,
Bartenwerfer, Malte
,
Krohs, Florian
,
Oliva, Maria
,
Harzendorf, Torsten
Published in
Nanotechnology
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Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
by
Paul, Thomas
,
Matthes, Andre
,
Harzendorf, Torsten
,
Ratzsch, Stephan
,
Zeitner, Uwe D.
Published in
Optical materials express
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