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SU-8 MEMS Fabry-Perot pressure sensor
by
Hill, G.C.
,
Melamud, R.
,
Declercq, F.E.
,
Davenport, A.A.
,
Chan, I.H.
,
Hartwell, P.G.
,
Pruitt, B.L.
Published in
Sensors and actuators. A. Physical.
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A Method for Wafer-Scale Encapsulation of Large Lateral Deflection MEMS Devices
by
Graham, A.B.
,
Messana, M.W.
,
Hartwell, P.G.
,
Provine, J.
,
Yoneoka, S.
,
Melamud, R.
,
Bongsang Kim
,
Howe, R.T.
,
Kenny, T.W.
Published in
Journal of microelectromechanical systems
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Integrated position sensing for control of XY actuator
by
Hartwell, P.G.
,
Walmsley, R.G.
,
Fasen, D.J.
,
Hoen, S.
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Conference Proceeding
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Passivated Electrode Actuator with Stable Resonance Amplitude
by
Bahl, G.
,
Walmsley, R.G.
,
DeMartini, B.E.
,
Turner, K.L.
,
Hartwell, P.G.
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Development of an SU-8 Fabry-Perot blood pressure sensor
by
Melamud, R.
,
Davenport, A.A.
,
Hill, G.C.
,
Chan, I.H.
,
Declercq, F.
,
Hartwell, P.G.
,
Pruitt, B.L.
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Single mask lateral tunneling accelerometer
by
Hartwell, P.G.
,
Bertsch, F.M.
,
Miller, S.A.
,
Turner, K.L.
,
MacDonald, N.C.
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Capacitance Based Tunable Micromechanical Resonators
by
Adams, S.G.
,
Bertsch, F.M.
,
Shaw, K.A.
,
Hartwell, P.G.
,
MacDonald, N.C.
,
Moon, F.C.
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