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Circle Patterning Technology with Negative Tone Development for ArF Immersion Extension
by
Oh, Changil
,
Hao, Junggun
,
Kim, Jaeheon
,
Lee, Junghung
,
Bok, Cheolkyu
,
Yim, Donggyu
Published in
Journal of Photopolymer Science and Technology
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Journal Of Photopolymer Science And Technology
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3-D Flash
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Assist Feature
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Contact Holes
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Devices
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Gate Plug
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Lithography
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Negative Tone Development
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Optimization
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Patterning
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Physical Sciences
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Polymer Science
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Positive Tone Development
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Program-Erase Speed
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Ptd
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Science & Technology
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Source Mask Optimization
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Three Dimensional
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Variability
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