Search Results - Grochowicz, Maciej

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    Computational proximity lithography with extreme ultraviolet radiation

    Computational proximity lithography with extreme ultraviolet radiation by Deuter, Valerie, Grochowicz, Maciej, Brose, Sascha, Biller, Jan, Danylyuk, Serhiy, Taubner, Thomas, Siemion, Agnieszka, Grützmacher, Detlev, Juschkin, Larissa

    Published in Optics express
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