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Annealing effect on mechanical stress in reactive ion-beam sputter-deposited silicon nitride films
by
FOURRIER, A
,
BOSSEBOEUF, A
,
BOUCHIER, D
,
GAUTHERIN, G
Published in
Japanese Journal of Applied Physics
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Ion beam sputtering deposition of tungsten: Energy and mass effects of primary ions
by
Meyer, Françoise
,
Louchier, Daniel
,
Stambouli, Valérie
,
Pellet, Claude
,
Schwebel, Christian
,
Gautherin, Guy
Published in
Applied surface science
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Argon incorporation effects on the conductivity of metal layers
by
Stambouli, Valérie
,
Burat, Olivier
,
Bouchier, Daniel
,
Meyer, Françoise
,
Gilles, Jean-Paul
,
Gautherin, Guy
Published in
Thin solid films
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Characterization of ion-beam-sputtered tungsten films on silicon
by
Meyer, Françoise
,
Schwebel, Christian
,
Pellet, Claude
,
Gautherin, Guy
Published in
Applied surface science
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Investigation of ion-beam-sputtered Nb-Ti thin films by complementary use of backscattering and nuclear-reaction microanalysis
by
Bouchier, Daniel
,
Gautherin, Guy
,
Agius, Bernard
,
Rigo, Serge
Published in
Journal of applied physics
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Effects of impurities on the interface of ion beam sputtered tungsten with silicon
by
Meyer, Françoise
,
Bouchier, Daniel
,
Benhocine, Abdelhamid
,
Gautherin, Guy
Published in
Applied surface science
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