Search Results - De Buttet, Côme

  • Showing 1 - 4 results of 4
Refine Results
  1. 1
    Deep Trenches Cleanliness Challenges for CMOS Image Sensors

    Deep Trenches Cleanliness Challenges for CMOS Image Sensors by Garnier, Philippe, Dignat, Franck, De Buttet, Côme

    Get full text
    Items that cite this one
    Conference Proceeding
    Save to List
    Saved in:
  2. 2
    Alternative to H 3 PO 4 for Si 3 N 4 Removal by Using Chemical Downstream Etching

    Alternative to H 3 PO 4 for Si 3 N 4 Removal by Using Chemical Downstream Etching by de Buttet, Côme, Gourhant, Olivier, Bouyssou, Régis, Zoll, Stephane

    Published in ECS transactions
    Get full text
    Items that cite this one
    Article
    Save to List
    Saved in:
  3. 3
    Alternative to H3PO4 for Si3N4 Removal by Using Chemical Downstream Etching

    Alternative to H3PO4 for Si3N4 Removal by Using Chemical Downstream Etching by de Buttet, Côme, Gourhant, Olivier, Bouyssou, Régis, Zoll, Stephane

    Get full text
    Conference Proceeding
    Save to List
    Saved in:
  4. 4
    Effects of Plasma and Wet Processes on Si-Rich Anti-Reflective Coating to Address Selective Trilayer Rework for Sub-20nm Technology Nodes

    Effects of Plasma and Wet Processes on Si-Rich Anti-Reflective Coating to Address Selective Trilayer Rework for Sub-20nm Technology Nodes by Pollet, Olivier, Sommer, Romain, Lachal, Laurent, Barnola, Sebastien, De Buttet, Come, Richard, Claire, Jenny, Cecile

    Get full text
    Conference Proceeding
    Save to List
    Saved in:

Search Tools: