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Search Results - Chen, Alek C.
Search Results - Chen, Alek C.
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Impact of Process-Effect Correction Strategies on Variability of Critical Dimension and Electrical Characteristics in Extreme Ultraviolet Lithography
by
Ng, Philip C. W
,
Chien, Sheng-Wei
,
Chang, Bo-Sen
,
Tsai, Kuen-Yu
,
Lu, Yi-Chang
,
Li, Jia-Han
,
Chen, Alek C
Published in
Japanese Journal of Applied Physics
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Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises
by
Lee, Yen-Min
,
Li, Jia-Han
,
Wang, Fu-Min
,
Cheng, Hsin-Hung
,
Shen, Yu-Tian
,
Tsai, Kuen-Yu
,
Shieh, Jason J
,
Chen, Alek C
Published in
Journal of Optics
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The Magnitude of Potential Exposure-Tool-Induced Critical Dimension and Overlay Errors in Double Dipole Lithography for the 65-nm and 45-nm Technology Nodes
by
Chiou, Tsann-Bim
,
Chen, Alek C.
,
Tseng, Shih-En
,
Eurlings, Mark
,
Hendrickx, Eric
,
Hsu, Stephen
Published in
Japanese Journal of Applied Physics
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Impact of Process-Effect Correction Strategies on Variability of Critical Dimension and Electrical Characteristics in Extreme Ultraviolet Lithography
by
Ng, Philip C. W.
,
Chien, Sheng-Wei
,
Chang, Bo-Sen
,
Tsai, Kuen-Yu
,
Lu, Yi-Chang
,
Li, Jia-Han
,
Chen, Alek C.
Published in
Japanese Journal of Applied Physics
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Assessing clinical quality performance and staffing capacity differences between urban and rural Health Resources and Services Administration-funded health centers in the United St...
by
Pourat, Nadereh
,
Chen, Xiao
,
Lu, Connie
,
Zhou, Weihao
,
Hoang, Hank
,
Sripipatana, Alek
Published in
PloS one
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Intra-operative recordings of local field potentials can help localize the subthalamic nucleus in Parkinson's disease surgery
by
Chen, Chiung Chu
,
Pogosyan, Alek
,
Zrinzo, Ludvic U.
,
Tisch, Stephen
,
Limousin, Patricia
,
Ashkan, Keyoumars
,
Yousry, Tarek
,
Hariz, Marwan I.
,
Brown, Peter
Published in
Experimental neurology
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Abstract PR-006: Spatially resolved, single cell assessment of pancreatic ductal adenocarcinoma expression subtypes reveals mixed and hybrid basal-classical marker expression with...
by
Williams, Hannah L.
,
Zhang, Jinming
,
Raghavan, Srivatsan
,
Winter, Peter S.
,
Kapner, Kevin
,
Vayrynen, Sara
,
Costa, Andressa Dias
,
Yuan, Chen
,
Lau, Mai Chan
,
Morales-Oyarvide, Vicente
,
Rubinson, Douglas
,
Brais, Lauren
,
Reilly, Emma
,
Kozak, Margaret
,
Linehan, David
,
Dunne, Richard
,
Chang, Daniel
,
Koong, Albert
,
Hezel, Aram
,
Hahn, William C.
,
Shalek, Alek K.
,
Aguirre, Andrew J.
,
Nowak, Jonathan A.
,
Wolpin, Brian M
Published in
Cancer research (Chicago, Ill.)
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EUV lithography introduction at Chipmakers
by
Wagner, C
,
Bacelar, J
,
Harned, N
,
Loopstra, E
,
Hendriks, S
,
de Jong, I
,
Kuerz, P
,
Levasier, L
,
van de Kerkhof, M
,
Lowisch, M
,
Meiling, H
,
Ockwell, D
,
Peeters, R
,
van Setten, E
,
Stoeldraijer, J
,
Young, S
,
Zimmerman, J
,
Kool, R
,
Chen, A
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Conference Proceeding
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