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Search Results - Bloomstein, T.M.
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Outlook for 157-nm Resist Designs
by
Kunz, R.R.
,
Bloomstein, T.M.
,
Hardy, D.E.
,
Goodman, R.B.
,
Downs, D.K.
,
Curtin, J.E.
Published in
Journal of Photopolymer Science and Technology
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Applications of lasers in microelectronics and micromechanics
by
Kunz, R.R.
,
Horn, M.W.
,
Bloomstein, T.M.
,
Ehrlich, D.J.
Published in
Applied surface science
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Fluorine—an enabler in advanced photolithography
by
Rothschild, M.
,
Bloomstein, T.M.
,
Fedynyshyn, T.H.
,
Liberman, V.
,
Mowers, W.
,
Sinta, R.
,
Switkes, M.
,
Grenville, A.
,
Orvek, K.
Published in
Journal of fluorine chemistry
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Laser-chemical three-dimensonal writing of multimaterial structures for microelectromechanics
by
Bloomstein, T.M.
,
Ehrlich, D.J.
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Conference Proceeding
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Nanoscale selective area epitaxy: towards lithographically defined quantum dots at 1.5 /spl mu/m using direct lithographic patterning
by
Swint, R.B.
,
Juodawlkis, P.W.
,
Oakley, D.C.
,
Napoleone, A.
,
Vineis, C.J.
,
Chludzinski, J.W.
,
Turner, G.W.
,
Twichell, J.C.
,
Bloomstein, T.M.
,
Cann, S.G.
,
Efremow, N.N.
,
Hardy, D.E.
,
Marchant, M.F.
,
Rothschild, M.
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Conference Proceeding
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Laser deposition and etching of three-dimensional microstructures
by
Bloomstein, T.M.
,
Ehrlich, D.J.
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Applied Surface Science
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Journal Of Fluorine Chemistry
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Journal Of Photopolymer Science And Technology
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Subjects
Chemistry
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Computer Aided Manufacturing
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Design Automation
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Etching
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Laser Modes
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Optical Design
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Optical Device Fabrication
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Physical Sciences
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Science & Technology
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Solid Lasers
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Solid Modeling
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157-Nm Lithography
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Cadcam
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Calcium Fluoride
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Chemistry, Inorganic & Nuclear
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Chemistry, Organic
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Chemistry, Physical
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Condensed Matter Physics
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Science Citation Index Expanded (Web Of Science)
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Backfile Package - Materials Science [Yms]
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