Atomic force microscope probe-based nanometric scribing

by Malekian, M, Park, S S, Strathearn, D, Mostofa, Md G, Jun, M B G
Published in Journal of micromechanics and microengineering

In-plane resonant nano-electro-mechanical sensors: a comprehensive study on design, fabrication and characterization challenges

by Hassani, Faezeh Arab, Tsuchiya, Yoshishige, Mizuta, Hiroshi
Published in Sensors (Basel, Switzerland)

Rapid X-ray Fabrication of Microstructured Polytetrafluoroethylene Substrates by Anisotropic, Pyrochemical Microetching

by Yamaguchi, Akinobu, Kido, Hideki, Utsumi, Yuichi
Published in Journal of Photopolymer Science and Technology

A comparison of the h-, p-, hp-, and rp-version of the FEM for the solution of the 2D Hertzian contact problem

by Franke, David, Düster, A., Nübel, V., Rank, E.
Published in Computational mechanics

Integration of rotated 3-D structures into pre-patterned PMMA substrate using step & stamp nanoimprint lithography

by Haatainen, T., Mäkelä, T., Schleunitz, A., Grenci, G., Tormen, M.
Published in Microelectronic engineering

X-ray Radiolysis-based Three Dimensional Additive Manufacturing Process

by Saegusa, Shunya, Sakurai, Ikuya, Okada, Ikuo, Fukuoka, Takao, Suzuki, Satoru, Utsumi, Yuichi, Yamaguchi, Akinobu
Published in Transactions of The Japan Institute of Electronics Packaging

Vision-based cellular force measurement using an elastic microfabricated device

by Liu, Xinyu, Sun, Yu, Wang, Wenhui, Lansdorp, Bob M
Published in Journal of micromechanics and microengineering

Detailed study of a micro heat engine for thermal energy harvesting

by Huesgen, T, Ruhhammer, J, Biancuzzi, G, Woias, P
Published in Journal of micromechanics and microengineering

Computational modeling of a carbon nanotube-based DNA nanosensor

by Kalantari-Nejad, R, Bahrami, M, Rafii-Tabar, H, Rungger, I, Sanvito, S
Published in Nanotechnology

Anderson localization regime in carbon nanotubes: size dependent properties

by Flores, F, Biel, B, Rubio, A, Garcia-Vidal, F J, Gomez-Navarro, C, de Pablo, P, Gomez-Herrero, J
Published in Journal of physics. Condensed matter

Multifunctional X-ray Lithography Station at VEPP-3

by Goldenberg, B.G., Lemzyakov, A.G., Nazmov, V.P., Pindyurin, V.F.
Published in Physics procedia

Laser micro-welding of aluminum alloys: experimental studies and numerical modeling

by Rohde, Magnus, Markert, Christine, Pfleging, Wilhelm
Published in International journal of advanced manufacturing technology

Forced periodic temperature cycling of chemical reactions in microstructure devices

by Luther, Martin, Brandner, Juergen J., Kiwi-Minsker, Lioubov, Renken, Albert, Schubert, Klaus
Published in Chemical engineering science

Modeling and simulation of wear in a pin on disc tribometer

by Hegadekatte, V., Huber, N., Kraft, O.
Published in Tribology letters

Alternative post-processing on a CMOS chip to fabricate a planar microelectrode array

by López-Huerta, Francisco, Herrera-May, Agustín L, Estrada-López, Johan J, Zuñiga-Islas, Carlos, Cervantes-Sanchez, Blanca, Soto, Enrique, Soto-Cruz, Blanca S
Published in Sensors (Basel, Switzerland)

Using a floating-gate MOS transistor as a transducer in a MEMS gas sensing system

by Barranca, Mario Alfredo Reyes, Mendoza-Acevedo, Salvador, Flores-Nava, Luis M, Avila-García, Alejandro, Vazquez-Acosta, E N, Moreno-Cadenas, José Antonio, Casados-Cruz, Gaspar
Published in Sensors (Basel, Switzerland)

Mechanical properties of thin silicon films deposited at low temperatures by PECVD

by Gaspar, J, Paul, O, Chu, V, Conde, J P
Published in Journal of micromechanics and microengineering

Magnetophoretic assembly and printing of nanowires

by Wright, Andrew C., Faulkner, Michael
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics

Note: Mechanical and electrical characterization of nanowires in scanning electron microscope

by Ru, Changhai, Sun, Lining
Published in Review of scientific instruments

Development of a surface micro-machined binary logic inverter for ultra-low frequency MEMS sensor applications

by Chakraborty, S, Bhattacharyya, T K
Published in Journal of micromechanics and microengineering