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1MOCVD of PZT thin films with different precursor solutions for testing mass-production compatibilityby JEONG, Seehwa, SHI-ZHAO, Jin, HA, Jowoong, HYE RYOUNG KIM, PARK, Dong-Yeon, CHEOL SEONG HWANG, YOUNG KI HAN, CHEOL HOON YANG, KI YOUNG OH, KIM, Seung-Hyun, LEE, Dong-SooGet full text
Published in Journal of the Electrochemical Society
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