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Meng, Y. Shirley
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Correlative Microscopy
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Meng, Y. Shirley
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Three-Dimensional Nanoscale Mapping of State-of-the-Art Field-Effect Transistors (FinFETs)
by
Parikh, Pritesh
,
Senowitz, Corey
,
Lyons, Don
,
Martin, Isabelle
,
Prosa, Ty J.
,
DiBattista, Michael
,
Devaraj, Arun
,
Meng, Y. Shirley
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Microscopy and microanalysis
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Field Effect Transistors
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Energy-Dispersive X-Ray Spectroscopy
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